Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process

Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process

A multi-function microelectromechanical system (MEMS) with a three-axis magnetometer (MAG) and three-axis accelerometer (ACC) function was implemented with an application-specific integrated circuit (ASIC)-compatible complementary metal-oxide-semiconductor (CMOS) 0.18 μm process. The readout circuit...

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Bibliographic Details
Main Authors: Chih-Hsuan Lin, Chao-Hung Song, Kuei-Ann Wen
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Micromachines
Subjects:
microelectromechanical systems
three-axis magnetometer
three-axis accelerometer
Online Access:https://www.mdpi.com/2072-666X/12/3/314

Internet

https://www.mdpi.com/2072-666X/12/3/314

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