MEMS gratings and their applications
Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2021-01-01
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| Series: | International Journal of Optomechatronics |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/15599612.2021.1892248 |