In-Plane MEMS Shallow Arch Beam for Mechanical Memory

In-Plane MEMS Shallow Arch Beam for Mechanical Memory

We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inher...

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Bibliographic Details
Main Authors: Md Abdullah Al Hafiz, Lakshmoji Kosuru, Abdallah Ramini, Karumbaiah N. Chappanda, Mohammad I. Younis
Format: Article
Language:English
Published: MDPI AG 2016-10-01
Series:Micromachines
Subjects:
in-plane MEMS
shallow arch
bistability
mechanical memory
Online Access:http://www.mdpi.com/2072-666X/7/10/191

Internet

http://www.mdpi.com/2072-666X/7/10/191

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