In-Plane MEMS Shallow Arch Beam for Mechanical Memory
We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inher...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/7/10/191 |
| _version_ | 1828363996776890368 |
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| author | Md Abdullah Al Hafiz Lakshmoji Kosuru Abdallah Ramini Karumbaiah N. Chappanda Mohammad I. Younis |
| author_facet | Md Abdullah Al Hafiz Lakshmoji Kosuru Abdallah Ramini Karumbaiah N. Chappanda Mohammad I. Younis |
| author_sort | Md Abdullah Al Hafiz |
| collection | DOAJ |
| description | We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion. Since it is independent of the electrostatic force, this nonlinearity gives more flexibility in the operating conditions and allows for lower actuation voltages. Experimental results are generated through electrical characterization setup. Results are shown demonstrating the switching between the two vibrational states with the change of the direct current (DC) bias voltage, thereby proving the memory concept. |
| first_indexed | 2024-04-14T05:09:02Z |
| format | Article |
| id | doaj.art-10d10f5b7e6d45188b878754fa8181b9 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-04-14T05:09:02Z |
| publishDate | 2016-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-10d10f5b7e6d45188b878754fa8181b92022-12-22T02:10:36ZengMDPI AGMicromachines2072-666X2016-10-0171019110.3390/mi7100191mi7100191In-Plane MEMS Shallow Arch Beam for Mechanical MemoryMd Abdullah Al Hafiz0Lakshmoji Kosuru1Abdallah Ramini2Karumbaiah N. Chappanda3Mohammad I. Younis4Computer, Electrical and Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaPhysical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaPhysical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaPhysical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaPhysical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaWe demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion. Since it is independent of the electrostatic force, this nonlinearity gives more flexibility in the operating conditions and allows for lower actuation voltages. Experimental results are generated through electrical characterization setup. Results are shown demonstrating the switching between the two vibrational states with the change of the direct current (DC) bias voltage, thereby proving the memory concept.http://www.mdpi.com/2072-666X/7/10/191in-plane MEMSshallow archbistabilitymechanical memory |
| spellingShingle | Md Abdullah Al Hafiz Lakshmoji Kosuru Abdallah Ramini Karumbaiah N. Chappanda Mohammad I. Younis In-Plane MEMS Shallow Arch Beam for Mechanical Memory Micromachines in-plane MEMS shallow arch bistability mechanical memory |
| title | In-Plane MEMS Shallow Arch Beam for Mechanical Memory |
| title_full | In-Plane MEMS Shallow Arch Beam for Mechanical Memory |
| title_fullStr | In-Plane MEMS Shallow Arch Beam for Mechanical Memory |
| title_full_unstemmed | In-Plane MEMS Shallow Arch Beam for Mechanical Memory |
| title_short | In-Plane MEMS Shallow Arch Beam for Mechanical Memory |
| title_sort | in plane mems shallow arch beam for mechanical memory |
| topic | in-plane MEMS shallow arch bistability mechanical memory |
| url | http://www.mdpi.com/2072-666X/7/10/191 |
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