Optical Sensor Methodology for Measuring Shift, Thickness, Refractive Index and Tilt Angle of Thin Films

Optical Sensor Methodology for Measuring Shift, Thickness, Refractive Index and Tilt Angle of Thin Films

We propose a simple optical method and device design for the non-contact determination of small shift, thickness, refractive index, and tilt angle of thin films. The proposed sensor consists of a laser light source, a third- or two-order spiral amplitude zone plate with a high numerical aperture, an...

Full description

Bibliographic Details
Main Authors: Anton Nalimov, Sergey Stafeev, Victor Kotlyar, Elena Kozlova
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Photonics
Subjects:
spiral zone plate
thickness sensor
displacement sensor
Online Access:https://www.mdpi.com/2304-6732/10/6/690

Internet

https://www.mdpi.com/2304-6732/10/6/690

Similar Items