Optical Sensor Methodology for Measuring Shift, Thickness, Refractive Index and Tilt Angle of Thin Films
We propose a simple optical method and device design for the non-contact determination of small shift, thickness, refractive index, and tilt angle of thin films. The proposed sensor consists of a laser light source, a third- or two-order spiral amplitude zone plate with a high numerical aperture, an...
Main Authors: | Anton Nalimov, Sergey Stafeev, Victor Kotlyar, Elena Kozlova |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-06-01
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Series: | Photonics |
Subjects: | |
Online Access: | https://www.mdpi.com/2304-6732/10/6/690 |
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