Design, Fabrication and Analysis of a Hybrid-Order Monolithic Imaging Diffractive Lens on a Germanium Substrate

Diffractive optical elements are gradually replacing some conventional optical elements and becoming a key component of optical systems due to their unique phase modulation function. However, the imaging performance will be reduced due to the fact that this single-sided microstructured lens still pr...

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Bibliographic Details
Main Authors: Yidi Zheng, Boping Lei, Bin Fan, Junfeng Du, Jiang Bian, Lihua Wang, Yuchen Liu, Shanghong Guan, Dun Liu, Qian Luo, Hu Yang, Hao Zhang, Chao Hu
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/3/657