Structure Performance Correlation of N-Heterocyclic Oligomer Leveler for Acid Copper Plating of Advanced Interconnects

Levelers, as an essential part of organic additives in copper electroplating, play a crucial role in the fabrication of sophisticated interconnects in integrated circuits, packaging substrates, and printed circuit boards. In this work, four N-heterocyclic oligomers were synthesized and characterized...

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Bibliographic Details
Main Authors: Chuan Peng, Yuehui Zhai, Xianming Chen, Chong Wang, Yan Hong, Yuanming Chen, Wei He, Guoyun Zhou, Binyun Liu
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Molecules
Subjects:
Online Access:https://www.mdpi.com/1420-3049/28/6/2783