Application of Heating Type Micro-Assembly Device in Two-Photon Micromachining
Abstract The development of micro-fabrication and micro-assembly technology is indispensable for the future manufacturing of miniaturized, functional, and integrated devices. This paper proposes a planar micro-assembly technology to make the assembly of micro-objects easier. Firstly, delicate three-...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2020-09-01
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| Series: | Photonic Sensors |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/s13320-020-0599-9 |