Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks

Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks

This research aims to replace ball joints of beam-structure electrostatic chucks (BSESC), which are limited by issues such as structural friction and inconsistent operation, thus enhancing the applicability in industrial settings. Torsion springs are used as rotational degree-of-freedom (RDOF) mecha...

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Bibliographic Details
Main Authors: Sanchuan Xu, Yuki Taoka, Shigeki Saito
Format: Article
Language:English
Published: Elsevier 2024-12-01
Series:Results in Engineering
Subjects:
Electromechanics
Structural mechanics
Mechanical design
Mechanical modeling
Non-linear analysis
Online Access:http://www.sciencedirect.com/science/article/pii/S2590123024016189

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http://www.sciencedirect.com/science/article/pii/S2590123024016189

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