Room-Temperature Formation of Hard BC<sub>x</sub> Films by Low Power Magnetron Sputtering
Boron carbide is one of the most important non-metallic materials. Amorphous BC<sub>x</sub> films were synthesized at room temperature by single- and dual-target magnetron sputtering processes. A B<sub>4</sub>C target and C target were operated using an RF signal and a DC sig...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-10-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/21/9896 |