Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe
The inner diameter measurement of the micro-hole was performed by a tactile microprobing system using a method of the local surface interaction force detection. The inner diameter of the micro-hole was calculated by the least square method based on the probing coordinates obtained by a custom-made m...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2023-02-01
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| Series: | Frontiers in Manufacturing Technology |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fmtec.2023.1104742/full |