Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe
The inner diameter measurement of the micro-hole was performed by a tactile microprobing system using a method of the local surface interaction force detection. The inner diameter of the micro-hole was calculated by the least square method based on the probing coordinates obtained by a custom-made m...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2023-02-01
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| Series: | Frontiers in Manufacturing Technology |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fmtec.2023.1104742/full |
| _version_ | 1827164813496680448 |
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| author | Masakazu Aruga So Ito Daichi Kato Kimihisa Matsumoto Kazuhide Kamiya |
| author_facet | Masakazu Aruga So Ito Daichi Kato Kimihisa Matsumoto Kazuhide Kamiya |
| author_sort | Masakazu Aruga |
| collection | DOAJ |
| description | The inner diameter measurement of the micro-hole was performed by a tactile microprobing system using a method of the local surface interaction force detection. The inner diameter of the micro-hole was calculated by the least square method based on the probing coordinates obtained by a custom-made micro-coordinate measuring machine. The dispersion of the probing coordinates was investigated by changing the probe approaching direction with respect to the normal direction of the inner side of the micro-hole. During the probing inside the micro-hole, it was confirmed that the dispersion of the probing coordinates increased when the disagreement between the probe approaching direction and the normal direction of the micro-hole at the measured point became large. The influence of the dispersion of the probing coordinates was evaluated through the uncertainty analysis of the inner diameter measurement. It was revealed that the uncertainty of the inner diameter measurement could be improved when limiting the disagreement between the probe approaching direction and the normal direction of the micro-hole to within ±pi/4 rad. |
| first_indexed | 2024-04-10T18:27:21Z |
| format | Article |
| id | doaj.art-129e9511148b4568a9d537eb659a8a16 |
| institution | Directory Open Access Journal |
| issn | 2813-0359 |
| language | English |
| last_indexed | 2025-03-21T01:22:34Z |
| publishDate | 2023-02-01 |
| publisher | Frontiers Media S.A. |
| record_format | Article |
| series | Frontiers in Manufacturing Technology |
| spelling | doaj.art-129e9511148b4568a9d537eb659a8a162024-08-03T01:59:19ZengFrontiers Media S.A.Frontiers in Manufacturing Technology2813-03592023-02-01310.3389/fmtec.2023.11047421104742Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobeMasakazu ArugaSo ItoDaichi KatoKimihisa MatsumotoKazuhide KamiyaThe inner diameter measurement of the micro-hole was performed by a tactile microprobing system using a method of the local surface interaction force detection. The inner diameter of the micro-hole was calculated by the least square method based on the probing coordinates obtained by a custom-made micro-coordinate measuring machine. The dispersion of the probing coordinates was investigated by changing the probe approaching direction with respect to the normal direction of the inner side of the micro-hole. During the probing inside the micro-hole, it was confirmed that the dispersion of the probing coordinates increased when the disagreement between the probe approaching direction and the normal direction of the micro-hole at the measured point became large. The influence of the dispersion of the probing coordinates was evaluated through the uncertainty analysis of the inner diameter measurement. It was revealed that the uncertainty of the inner diameter measurement could be improved when limiting the disagreement between the probe approaching direction and the normal direction of the micro-hole to within ±pi/4 rad.https://www.frontiersin.org/articles/10.3389/fmtec.2023.1104742/fullmicroprobeCMMinner diameterlaser processing machiningsurface interaction force |
| spellingShingle | Masakazu Aruga So Ito Daichi Kato Kimihisa Matsumoto Kazuhide Kamiya Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe Frontiers in Manufacturing Technology microprobe CMM inner diameter laser processing machining surface interaction force |
| title | Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe |
| title_full | Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe |
| title_fullStr | Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe |
| title_full_unstemmed | Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe |
| title_short | Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe |
| title_sort | investigation of probing repeatability inside a micro hole by changing probe approach direction for a local surface interaction force detection type microprobe |
| topic | microprobe CMM inner diameter laser processing machining surface interaction force |
| url | https://www.frontiersin.org/articles/10.3389/fmtec.2023.1104742/full |
| work_keys_str_mv | AT masakazuaruga investigationofprobingrepeatabilityinsideamicroholebychangingprobeapproachdirectionforalocalsurfaceinteractionforcedetectiontypemicroprobe AT soito investigationofprobingrepeatabilityinsideamicroholebychangingprobeapproachdirectionforalocalsurfaceinteractionforcedetectiontypemicroprobe AT daichikato investigationofprobingrepeatabilityinsideamicroholebychangingprobeapproachdirectionforalocalsurfaceinteractionforcedetectiontypemicroprobe AT kimihisamatsumoto investigationofprobingrepeatabilityinsideamicroholebychangingprobeapproachdirectionforalocalsurfaceinteractionforcedetectiontypemicroprobe AT kazuhidekamiya investigationofprobingrepeatabilityinsideamicroholebychangingprobeapproachdirectionforalocalsurfaceinteractionforcedetectiontypemicroprobe |