Three-Dimensional Simulation Research on Discharge Characteristics of Inductively Coupled Plasma
Aiming at the discharge problem of inductively coupled plasma (ICP), a closed wave-transmitting cavi-ty configuration is designed, the fluid mechanics model of ICP is established, and the multi physical simulation software COMSOL is used for three-dimensional simulation research. The variation laws...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Aero Weaponry
2022-06-01
|
| Series: | Hangkong bingqi |
| Subjects: | |
| Online Access: | https://www.aeroweaponry.avic.com/fileup/1673-5048/PDF/1658972649318-64530976.pdf |