Multi-planar amorphous silicon photonics with compact interplanar couplers, cross talk mitigation, and low crossing loss
We propose and experimentally demonstrate a photonic routing architecture that can efficiently utilize the space of multi-plane (3D) photonic integration. A wafer with three planes of amorphous silicon waveguides was fabricated and characterized, demonstrating...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2017-11-01
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Series: | APL Photonics |
Online Access: | http://dx.doi.org/10.1063/1.5000384 |