Multi-planar amorphous silicon photonics with compact interplanar couplers, cross talk mitigation, and low crossing loss
We propose and experimentally demonstrate a photonic routing architecture that can efficiently utilize the space of multi-plane (3D) photonic integration. A wafer with three planes of amorphous silicon waveguides was fabricated and characterized, demonstrating...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2017-11-01
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Series: | APL Photonics |
Online Access: | http://dx.doi.org/10.1063/1.5000384 |
Summary: | We propose and experimentally demonstrate a photonic routing architecture that can
efficiently utilize the space of multi-plane (3D) photonic integration. A wafer with three
planes of amorphous silicon waveguides was fabricated and characterized, demonstrating
<
3
×
1
0
−
4
dB loss per out-of-plane waveguide crossing,
0.05
±
0.02
dB per interplane coupler, and microring resonators on
three planes with a quality factors up to
8.2
×
1
0
4
. We also explore a phase velocity mapping strategy to
mitigate the cross talk between co-propagating waveguides on different planes. These
results expand the utility of 3D photonic integration for applications such as optical
interconnects, neuromorphic computing and optical phased arrays. |
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ISSN: | 2378-0967 |