Design, Modeling and Analysis of Perforated RF MEMS Capacitive Shunt Switch

This paper illustrates the design, modeling, and analysis of bridge type structure based capacitive RF MEMS switch with different beam thickness and materials. We have used Ashby's approach to select the best materials in each and every level which helped to improve the overall performance of t...

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Bibliographic Details
Main Authors: K. Srinivasa Rao, Ch. Gopi Chand, K. Girija Sravani, D. Prathyusha, P. Naveena, G. Sai Lakshmi, P. Ashok Kumar, T. Lakshmi Narayana
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8704302/