A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator
This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO<sub>2</sub> substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/4/628 |