A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator
This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO<sub>2</sub> substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-04-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/4/628 |
| _version_ | 1827619559676313600 |
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| author | Wenyao Liu Wei Li Chenxi Liu Enbo Xing Yanru Zhou Lai Liu Jun Tang |
| author_facet | Wenyao Liu Wei Li Chenxi Liu Enbo Xing Yanru Zhou Lai Liu Jun Tang |
| author_sort | Wenyao Liu |
| collection | DOAJ |
| description | This paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO<sub>2</sub> substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic field changed the surface tension of the graphene, resulting in a significant change in the resonance frequency of graphene. Using the finite element analysis, it could be found that the response of the resonance frequency revealed a good linear relationship with the external magnetic field (along the <i>x</i>-axis) in the range of the 1 to 1.6 mT. By optimizing the sizes of each component of the magnetic sensor, such as the thickness of the Si/SiO<sub>2</sub> substrate and the Fe–Ga alloy, and the length of the graphene, the sensitivity could even reach 834 kHz/mT, which is three orders of magnitude higher than conventional resonant magnetic devices. This provides a new method for highly sensitive and miniaturized magnetic sensors. |
| first_indexed | 2024-03-09T10:30:48Z |
| format | Article |
| id | doaj.art-12dbabd7fb034c799a9f1152b57a6a0d |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T10:30:48Z |
| publishDate | 2022-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-12dbabd7fb034c799a9f1152b57a6a0d2023-12-01T21:14:43ZengMDPI AGMicromachines2072-666X2022-04-0113462810.3390/mi13040628A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical ResonatorWenyao Liu0Wei Li1Chenxi Liu2Enbo Xing3Yanru Zhou4Lai Liu5Jun Tang6Shanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051, ChinaShanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051, ChinaShanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051, ChinaShanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051, ChinaShanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051, ChinaShanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051, ChinaShanxi Province Key Laboratory of Quantum Sensing and Precision Measurement, North University of China, Taiyuan 030051, ChinaThis paper presents a novel resonant magnetic sensor consisting of a graphene nanomechanical oscillator and magnetostrictive stress coupling structure, using Si/SiO<sub>2</sub> substrate and Fe–Ga alloy, respectively. In this device, the deformation of the Fe–Ga alloy resulting from the external magnetic field changed the surface tension of the graphene, resulting in a significant change in the resonance frequency of graphene. Using the finite element analysis, it could be found that the response of the resonance frequency revealed a good linear relationship with the external magnetic field (along the <i>x</i>-axis) in the range of the 1 to 1.6 mT. By optimizing the sizes of each component of the magnetic sensor, such as the thickness of the Si/SiO<sub>2</sub> substrate and the Fe–Ga alloy, and the length of the graphene, the sensitivity could even reach 834 kHz/mT, which is three orders of magnitude higher than conventional resonant magnetic devices. This provides a new method for highly sensitive and miniaturized magnetic sensors.https://www.mdpi.com/2072-666X/13/4/628nanomechanical resonatorgraphenemagnetic sensor |
| spellingShingle | Wenyao Liu Wei Li Chenxi Liu Enbo Xing Yanru Zhou Lai Liu Jun Tang A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator Micromachines nanomechanical resonator graphene magnetic sensor |
| title | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
| title_full | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
| title_fullStr | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
| title_full_unstemmed | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
| title_short | A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator |
| title_sort | high sensitivity resonant magnetic sensor based on graphene nanomechanical resonator |
| topic | nanomechanical resonator graphene magnetic sensor |
| url | https://www.mdpi.com/2072-666X/13/4/628 |
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