A Study on the Characteristic and Antibacterial Activity of Ti<sub>3</sub>O<sub>x</sub> Thin Films
A pure Ti target in Ar/O<sub>2</sub> gas mixture was used to synthesize Ti<sub>3</sub>O<sub>x</sub> thin film on a glass substrate by Reactive High-Power Impulse Magnetron Sputtering (HiPIMS) under different sputtering power (2 and 2.5 kW). The influence of HiPIMS...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-11-01
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| Series: | Catalysts |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4344/11/11/1416 |