Key Technologies and Design Methods of Ultra-Precision Aerostatic Bearings
Precision measurement technology and instruments are the basis for high-quality development in modern industry. With the specialization of supporting facilities, ultra-precision motion guidance has become a core technology to achieve ultra-precision measurement. Aerostatic bearings have the advantag...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-07-01
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| Series: | Lubricants |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-4442/11/8/315 |