Preparation and relevant properties of amorphous AlBN dielectric films

Preparation and relevant properties of amorphous AlBN dielectric films

Amorphous AlBN dielectric films were deposited on GaN (002) by pulsed laser deposition (PLD). The crystal structure and composition of the grown films were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). Conductive atomic f...

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Bibliographic Details
Main Authors:	LIU Feng-feng, LI Yu-xiong, SUI Zhan-peng, CAI Yong, ZHANG Yong-hong, JIANG Chun-ping
Format:	Article
Language:	zho
Published:	Journal of Materials Engineering 2020-06-01
Series:	Cailiao gongcheng
Subjects:	albn pulsed laser deposition amorphous film
Online Access:	http://jme.biam.ac.cn/CN/Y2020/V48/I6/112

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