Chemical Vapour Deposition of Scandia-Stabilised Zirconia Layers on Tubular Substrates at Low Temperatures
The paper presents results of investigation on synthesis of non-porous ZrO<sub>2</sub>-Sc<sub>2</sub>O<sub>2</sub> layers on tubular substrates by MOCVD (metalorganic chemical vapor deposition) method using Sc(tmhd)<sub>3</sub> (Tris(2,2,6,6-tetramethy...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-03-01
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| Series: | Materials |
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| Online Access: | https://www.mdpi.com/1996-1944/15/6/2120 |