Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field
Global existence and uniqueness conditions for a dimensionless fourth-order integro-differential model for an electrostatic-elastic MEMS device with parallel plates and fringing field contribution were recently achieved by the Authors. Moving from this work, once the dielectric profile of the deform...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-09-01
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| Series: | Electronics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-9292/11/19/3010 |