Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field
Global existence and uniqueness conditions for a dimensionless fourth-order integro-differential model for an electrostatic-elastic MEMS device with parallel plates and fringing field contribution were recently achieved by the Authors. Moving from this work, once the dielectric profile of the deform...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-09-01
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| Series: | Electronics |
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| Online Access: | https://www.mdpi.com/2079-9292/11/19/3010 |
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| author | Mario Versaci Luisa Fattorusso Alessandra Jannelli Paolo Di Barba |
| author_facet | Mario Versaci Luisa Fattorusso Alessandra Jannelli Paolo Di Barba |
| author_sort | Mario Versaci |
| collection | DOAJ |
| description | Global existence and uniqueness conditions for a dimensionless fourth-order integro-differential model for an electrostatic-elastic MEMS device with parallel plates and fringing field contribution were recently achieved by the Authors. Moving from this work, once the dielectric profile of the deformable plate according with experimental setups has been assigned, some technical conditions of applicability for the intended use of the device as well as the mechanical tension of the deformable plate are presented and discussed. Then, highlighting the link between the fringing field and the electrostatic force, finite differences were exploited for recovering the deformable plate profile according both global existence and uniqueness conditions. Moreover, the influence of the electro-mechanical properties of the deformable plate on both the numerical approach and on the intended uses of the device is discussed, comparing the results with experimental setups regarding pull-in voltage and electrostatic pressure. |
| first_indexed | 2024-03-09T21:51:30Z |
| format | Article |
| id | doaj.art-13a949119aff4b83b420d59111331978 |
| institution | Directory Open Access Journal |
| issn | 2079-9292 |
| language | English |
| last_indexed | 2024-03-09T21:51:30Z |
| publishDate | 2022-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Electronics |
| spelling | doaj.art-13a949119aff4b83b420d591113319782023-11-23T20:04:47ZengMDPI AGElectronics2079-92922022-09-011119301010.3390/electronics11193010Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing FieldMario Versaci0Luisa Fattorusso1Alessandra Jannelli2Paolo Di Barba3DICEAM Department, “Mediterranea” University, I-89122 Reggio Calabria, ItalyDIIES Department, “Mediterranea” University, I-89122 Reggio Calabria, ItalyMIFT Department, University of Messina, I-98166 Messina, ItalyDipartimento di Ingegneria Industriale e dell’Informazione, University of Pavia, Via A. Ferrata 5, I-27100 Pavia, ItalyGlobal existence and uniqueness conditions for a dimensionless fourth-order integro-differential model for an electrostatic-elastic MEMS device with parallel plates and fringing field contribution were recently achieved by the Authors. Moving from this work, once the dielectric profile of the deformable plate according with experimental setups has been assigned, some technical conditions of applicability for the intended use of the device as well as the mechanical tension of the deformable plate are presented and discussed. Then, highlighting the link between the fringing field and the electrostatic force, finite differences were exploited for recovering the deformable plate profile according both global existence and uniqueness conditions. Moreover, the influence of the electro-mechanical properties of the deformable plate on both the numerical approach and on the intended uses of the device is discussed, comparing the results with experimental setups regarding pull-in voltage and electrostatic pressure.https://www.mdpi.com/2079-9292/11/19/30103D electrostatic-elastic MEMSPelesko–Driskoll’s theory for fringing field modelingfinite difference approachesprofile recoveringghost solutions |
| spellingShingle | Mario Versaci Luisa Fattorusso Alessandra Jannelli Paolo Di Barba Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field Electronics 3D electrostatic-elastic MEMS Pelesko–Driskoll’s theory for fringing field modeling finite difference approaches profile recovering ghost solutions |
| title | Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field |
| title_full | Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field |
| title_fullStr | Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field |
| title_full_unstemmed | Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field |
| title_short | Finite Differences for Recovering the Plate Profile in Electrostatic MEMS with Fringing Field |
| title_sort | finite differences for recovering the plate profile in electrostatic mems with fringing field |
| topic | 3D electrostatic-elastic MEMS Pelesko–Driskoll’s theory for fringing field modeling finite difference approaches profile recovering ghost solutions |
| url | https://www.mdpi.com/2079-9292/11/19/3010 |
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