High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area

High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area

This paper reports on the deposition and characterization of piezoelectric Al<sub>X</sub>Sc<sub>1-X</sub>N (further: AlScN) films on Si substrates using AlSc alloy targets with 30 at.% Sc. Films were deposited on a Ø200 mm area with deposition rates of 200 nm/min using a reac...

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Bibliographic Details
Main Authors: Stephan Barth, Tom Schreiber, Steffen Cornelius, Olaf Zywitzki, Thomas Modes, Hagen Bartzsch
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Micromachines
Subjects:
AlScN
aluminum scandium nitride
piezoelectric thin films
piezoelectric
ferroelectric
Online Access:https://www.mdpi.com/2072-666X/13/10/1561

Internet

https://www.mdpi.com/2072-666X/13/10/1561

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