Anisotropic Resistivity Size Effect in Epitaxial Mo(001) and Mo(011) Layers

Anisotropic Resistivity Size Effect in Epitaxial Mo(001) and Mo(011) Layers

Mo(001) and Mo(011) layers with thickness <i>d</i> = 4–400 nm are sputter-deposited onto MgO(001) and α-Al<sub>2</sub>O<sub>3</sub>(11<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics>...

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Bibliographic Details
Main Authors: Atharv Jog, Pengyuan Zheng, Tianji Zhou, Daniel Gall
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Nanomaterials
Subjects:
electron transport
interconnects
epitaxy
thin films
surface scattering
Online Access:https://www.mdpi.com/2079-4991/13/6/957

Internet

https://www.mdpi.com/2079-4991/13/6/957

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