Synthesis of Boron-Doped Silicon Film Using Hot Wire Chemical Vapor Deposition Technique
Boron-doped polycrystalline silicon film was synthesized using hot wire chemical vapor deposition technique for possible application in photonics devices. To investigate the effect of substrate, we considered Si/SiO<sub>2</sub>, glass/ITO/TiO<sub>2</sub>, Al<sub>2</s...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-03-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/10/4/237 |