Research on three-dimensional microfabrication using photocatalytic reaction at the vicinity of beam waist
Recently, the method of micro fabrication has been important in the field of manufacturing, and a demand on microfabrication has been increasing for a new micro functional devices such as photonic crystals. In this research, we propose a new method of microfabrication using a metal ion solution, a c...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2015-09-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/81/832/81_15-00309/_pdf/-char/en |