Deformations of Single-Crystal Silicon Circular Plate: Theory and Experiment
In this paper, the experimental methodology for the single-crystal circular plate deformation measurement and subsequent procedure for the quantitation of its mechanical properties are developed. The procedure is based on a new numerical-analytical solution of non-linear boundary-value problem for f...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-01-01
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| Series: | Symmetry |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-8994/16/2/137 |