Deformations of Single-Crystal Silicon Circular Plate: Theory and Experiment

Deformations of Single-Crystal Silicon Circular Plate: Theory and Experiment

In this paper, the experimental methodology for the single-crystal circular plate deformation measurement and subsequent procedure for the quantitation of its mechanical properties are developed. The procedure is based on a new numerical-analytical solution of non-linear boundary-value problem for f...

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Bibliographic Details
Main Authors: Sergey Lychev, Alexander Digilov, Gleb Demin, Evgeney Gusev, Ivan Kushnarev, Nikolay Djuzhev, Vladimir Bespalov
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Symmetry
Subjects:
micro/nanoelectromechanical system (MEMS/NEMS)
membrane
crystalline anisotropy
single-crystal material
silicon-on-insulator (SOI)
deformation
Online Access:https://www.mdpi.com/2073-8994/16/2/137

Internet

https://www.mdpi.com/2073-8994/16/2/137

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