Optimizations of Double Titanium Nitride Thermo-Optic Phase-Shifter Heaters Using SOI Technology

Optimizations of Double Titanium Nitride Thermo-Optic Phase-Shifter Heaters Using SOI Technology

A commercial thermo-optic phase shifter (TOPS) is an efficient solution to the imbalance problem in the fabrication process of Mach–Zehnder modulator (MZM) arms. The TOPS consumes electrical power and transforms it into thermal energy, which changes the real part of the effective refractive index at...

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Bibliographic Details
Main Authors: Eylon Eliyahu Krause, Dror Malka
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Sensors
Subjects:
titanium nitride
SOI
silicon
phase shifter
MZM
Online Access:https://www.mdpi.com/1424-8220/23/20/8587

Internet

https://www.mdpi.com/1424-8220/23/20/8587

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