Room-Temperature O<sub>3</sub> Detection: Zero-Bias Sensors Based on ZnO Thin Films

Room-Temperature O<sub>3</sub> Detection: Zero-Bias Sensors Based on ZnO Thin Films

ZnO thin films with a thickness of 300 nm were deposited on Si and Al<sub>2</sub>O<sub>3</sub> substrates using an electron beam evaporation technique with the aim of testing them as low cost and low power consumption gas sensors for ozone (O<sub>3</sub>). Scannin...

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Bibliographic Details
Main Authors: Eleonora Bolli, Alice Fornari, Alessandro Bellucci, Matteo Mastellone, Veronica Valentini, Alessio Mezzi, Riccardo Polini, Antonio Santagata, Daniele Maria Trucchi
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Crystals
Subjects:
thin film
MOX
gas sensor
chemiresistor
Online Access:https://www.mdpi.com/2073-4352/14/1/90

Internet

https://www.mdpi.com/2073-4352/14/1/90

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