Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor

Enhanced Electrothermal Analysis for Acetone Gas Detection Based on PolyMUMPs MEMS Sensor

Environmental monitoring for the detection and regulation of toxic gases is of paramount importance. This study proposes the modeling and fabrication of MEMS devices based on the standard Polysilicon Multi-Users MEMS Process (PolyMUMPs) for acetone gas detection. Titanium dioxide (<inline-formula...

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Bibliographic Details
Main Authors: Abdullah S. Algamili, Zmri Zainal Abidin, Mohd Haris Bin Md. Khir, Abdelaziz Yousif Ahmed, Saeed S. Ba Hashwan, Usman Bature Isyaku, Bakr Naser Al-Dhawi, Ali Ahmed Salem
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Access
Subjects:
Characterization
electrothermal actuation
fabrication technology
gas detection
MEMS devices
PolyMUMPs sensor
Online Access:https://ieeexplore.ieee.org/document/10433195/

Internet

https://ieeexplore.ieee.org/document/10433195/

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