Active Area Uniformity of InGaAs/InP Single-Photon Avalanche Diodes
We present a detailed characterization of the active area uniformity of InGaAs/InP Single-Photon Avalanche Diodes (SPADs) from two different design iterations. Nonuniformity of the electric field within the device active area has been measured through 2-D scans of detection efficiency and timing res...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2011-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/5671447/ |