Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide

In this research, a new application of reduced graphene oxide (rGO) for a complementary metal-oxide-semiconductor (CMOS)-MEMS infrared (IR) sensor and emitter is proposed. Thorough investigations of IR properties including absorption and emission were proceeded with careful calibration and measureme...

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Bibliographic Details
Main Authors: Shu-Jung Chen, Bin Chen
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/20/14/4007