High Uniformity 6-Inch InGaP Epitaxial Growth
The growth of 6-inch In<sub>0.485</sub>Ga<sub>0.515</sub>P has been examined in this study. The effects of growth temperature, the V/III ratio, and the H<sub>2</sub> total flow on solid composition, growth rate, and crystal quality have been systematically investi...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-07-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/13/8/1165 |