Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs

Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs

High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in comparison with traditional electrostatic actuat...

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Bibliographic Details
Main Authors: Muhammad Masood ul Hassan, Michael Kraft, Rana Iqtidar Shakoor, Shafaat Ahmed Bazaz, Yongjun Lai
Format: Article
Language:English
Published: MDPI AG 2009-04-01
Series:Sensors
Subjects:
Finite element method
micromachined gyroscope
MEMS
thermal V shaped actuator
chevron-shaped actuator
Online Access:http://www.mdpi.com/1424-8220/9/4/2389/

Internet

http://www.mdpi.com/1424-8220/9/4/2389/

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