Grand challenges in low temperature plasmas

Grand challenges in low temperature plasmas

Low temperature plasmas (LTPs) enable to create a highly reactive environment at near ambient temperatures due to the energetic electrons with typical kinetic energies in the range of 1 to 10 eV (1 eV = 11600K), which are being used in applications ranging from plasma etching of electronic chips and...

Full description

Bibliographic Details
Main Authors: XinPei Lu, Peter J. Bruggeman, Stephan Reuter, George Naidis, Annemie Bogaerts, Mounir Laroussi, Michael Keidar, Eric Robert, Jean-Michel Pouvesle, DaWei Liu, Kostya (Ken) Ostrikov
Format: Article
Language:English
Published: Frontiers Media S.A. 2022-10-01
Series:Frontiers in Physics
Subjects:
low temperature plasmas (LTP)
plasma etching (PE)
plasma-assisted combustion
atmospheric pressure plasmas
plasma for health
plasma for energy conversion
Online Access:https://www.frontiersin.org/articles/10.3389/fphy.2022.1040658/full

Internet

https://www.frontiersin.org/articles/10.3389/fphy.2022.1040658/full

Similar Items