Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS re...

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Bibliographic Details
Main Authors: Francesc Torres, Arantxa Uranga, Martí Riverola, Guillermo Sobreviela, Núria Barniol
Format: Article
Language:English
Published: MDPI AG 2016-10-01
Series:Sensors
Subjects:
MEMS
synchronization
resonators
CMOS-MEMS
cantilevers
arrays
coupling
Online Access:http://www.mdpi.com/1424-8220/16/10/1690

Internet

http://www.mdpi.com/1424-8220/16/10/1690

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