Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors
Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS re...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2016-10-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/16/10/1690 |
| _version_ | 1798025947825307648 |
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| author | Francesc Torres Arantxa Uranga Martí Riverola Guillermo Sobreviela Núria Barniol |
| author_facet | Francesc Torres Arantxa Uranga Martí Riverola Guillermo Sobreviela Núria Barniol |
| author_sort | Francesc Torres |
| collection | DOAJ |
| description | Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, thereby preserving mass responsivity. The authors present an array of five cantilevers (CMOS-MEMS system) that are forced to vibrate synchronously to enhance their frequency stability. The frequency stability has been determined in closed-loop configuration for long periods of time by calculating the Allan deviation. An Allan deviation of 0.013 ppm (@ 1 s averaging time) for a 1 MHz cantilever array MEMS system was obtained at the synchronized mode, which represents a 23-fold improvement in comparison with the non-synchronized operation mode (0.3 ppm). |
| first_indexed | 2024-04-11T18:27:11Z |
| format | Article |
| id | doaj.art-15cb6244f2014fbca7276da106dc7f3f |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T18:27:11Z |
| publishDate | 2016-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-15cb6244f2014fbca7276da106dc7f3f2022-12-22T04:09:35ZengMDPI AGSensors1424-82202016-10-011610169010.3390/s16101690s16101690Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based SensorsFrancesc Torres0Arantxa Uranga1Martí Riverola2Guillermo Sobreviela3Núria Barniol4Electrical Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB Bellaterra, Cerdanyola del Vallès 08193, SpainElectrical Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB Bellaterra, Cerdanyola del Vallès 08193, SpainElectrical Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB Bellaterra, Cerdanyola del Vallès 08193, SpainElectrical Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB Bellaterra, Cerdanyola del Vallès 08193, SpainElectrical Engineering Department, Universitat Autònoma de Barcelona, Edifici Q, Campus UAB Bellaterra, Cerdanyola del Vallès 08193, SpainMicro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, thereby preserving mass responsivity. The authors present an array of five cantilevers (CMOS-MEMS system) that are forced to vibrate synchronously to enhance their frequency stability. The frequency stability has been determined in closed-loop configuration for long periods of time by calculating the Allan deviation. An Allan deviation of 0.013 ppm (@ 1 s averaging time) for a 1 MHz cantilever array MEMS system was obtained at the synchronized mode, which represents a 23-fold improvement in comparison with the non-synchronized operation mode (0.3 ppm).http://www.mdpi.com/1424-8220/16/10/1690MEMSsynchronizationresonatorsCMOS-MEMScantileversarrayscoupling |
| spellingShingle | Francesc Torres Arantxa Uranga Martí Riverola Guillermo Sobreviela Núria Barniol Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors Sensors MEMS synchronization resonators CMOS-MEMS cantilevers arrays coupling |
| title | Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors |
| title_full | Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors |
| title_fullStr | Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors |
| title_full_unstemmed | Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors |
| title_short | Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors |
| title_sort | enhancement of frequency stability using synchronization of a cantilever array for mems based sensors |
| topic | MEMS synchronization resonators CMOS-MEMS cantilevers arrays coupling |
| url | http://www.mdpi.com/1424-8220/16/10/1690 |
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