A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration
The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conduct...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/8/2848 |