A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration
The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conduct...
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| Format: | Article |
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MDPI AG
2022-04-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/8/2848 |
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| author | Ying Guo Bo Li Qi Zhang Xiao-Ting He Jun-Yi Sun |
| author_facet | Ying Guo Bo Li Qi Zhang Xiao-Ting He Jun-Yi Sun |
| author_sort | Ying Guo |
| collection | DOAJ |
| description | The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conductive thin film deflects elastically, which in turn moves the conductive thin plate (as a movable upper electrode plate of the parallel plate capacitor) towards the lower electrode plate, resulting in a change in the capacitance of the capacitor. Therefore, the applied pressure can be determined by measuring the capacitance change, based on the closed-form solution for the elastic behavior of the annular thin film under pressure. Such capacitive pressure sensors are more suitable for large-sized sensors such as those used for building-facade wind pressure measurements, etc. In this paper, a further theoretical study of such capacitive pressure sensors is presented. The newly presented, more refined closed-form solution can greatly reduce the output pressure error under the same input capacitance, in comparison with the previously presented closed-form solution. A numerical example of how to use the resulting closed-form solution to numerically calibrate input–output characteristics is given for the first time. The variation trend of pressure operation ranges and input–output characteristics with important parametric variations, which can be used for guiding the design of such capacitive pressure sensors, is investigated. |
| first_indexed | 2024-03-09T13:02:24Z |
| format | Article |
| id | doaj.art-15e742820bbd49f89037ed6175d54347 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T13:02:24Z |
| publishDate | 2022-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-15e742820bbd49f89037ed6175d543472023-11-30T21:52:07ZengMDPI AGSensors1424-82202022-04-01228284810.3390/s22082848A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical CalibrationYing Guo0Bo Li1Qi Zhang2Xiao-Ting He3Jun-Yi Sun4School of Civil Engineering, Chongqing University, Chongqing 400045, ChinaSchool of Civil Engineering, Chongqing University, Chongqing 400045, ChinaSchool of Civil Engineering, Chongqing University, Chongqing 400045, ChinaSchool of Civil Engineering, Chongqing University, Chongqing 400045, ChinaSchool of Civil Engineering, Chongqing University, Chongqing 400045, ChinaThe capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conductive thin film deflects elastically, which in turn moves the conductive thin plate (as a movable upper electrode plate of the parallel plate capacitor) towards the lower electrode plate, resulting in a change in the capacitance of the capacitor. Therefore, the applied pressure can be determined by measuring the capacitance change, based on the closed-form solution for the elastic behavior of the annular thin film under pressure. Such capacitive pressure sensors are more suitable for large-sized sensors such as those used for building-facade wind pressure measurements, etc. In this paper, a further theoretical study of such capacitive pressure sensors is presented. The newly presented, more refined closed-form solution can greatly reduce the output pressure error under the same input capacitance, in comparison with the previously presented closed-form solution. A numerical example of how to use the resulting closed-form solution to numerically calibrate input–output characteristics is given for the first time. The variation trend of pressure operation ranges and input–output characteristics with important parametric variations, which can be used for guiding the design of such capacitive pressure sensors, is investigated.https://www.mdpi.com/1424-8220/22/8/2848capacitive pressure sensorparallel plate capacitorelastic deflectionannular membraneclosed-form solution |
| spellingShingle | Ying Guo Bo Li Qi Zhang Xiao-Ting He Jun-Yi Sun A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration Sensors capacitive pressure sensor parallel plate capacitor elastic deflection annular membrane closed-form solution |
| title | A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration |
| title_full | A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration |
| title_fullStr | A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration |
| title_full_unstemmed | A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration |
| title_short | A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration |
| title_sort | further theoretical study of capacitive pressure sensors based on thin film elastic deflection and parallel plate capacitor refined closed form solution and numerical calibration |
| topic | capacitive pressure sensor parallel plate capacitor elastic deflection annular membrane closed-form solution |
| url | https://www.mdpi.com/1424-8220/22/8/2848 |
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