Pulse duration dependent laser-induced plasma etching of polyimide using a high repetition rate laser
Although laser ablation of polymers is well investigated the achievable surface quality of this process is limited due to laser-induced structural and morphological defects, arising surface roughness and redeposition of debris. Because high quality machining with laser radiation is highly requested,...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-10-01
|
| Series: | Applied Surface Science Advances |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523923000843 |