Monte Carlo and Kinetic Monte Carlo Models for Deposition Processes: A Review of Recent Works
Monte Carlo (MC) and kinetic Monte Carlo (kMC) models are widely used for studying the physicochemical surface phenomena encountered in most deposition processes. This spans from physical and chemical vapor deposition to atomic layer and electrochemical deposition. MC and kMC, in comparison to popul...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Frontiers Media S.A.
2021-04-01
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Series: | Frontiers in Physics |
Subjects: | |
Online Access: | https://www.frontiersin.org/articles/10.3389/fphy.2021.631918/full |