Thermo-Optic Phase Shifter with Interleaved Suspended Design for Power Efficiency and Speed Adjustment
Conventional thermo-optic devices—which can be broadly categorized to that with and without a thermal isolation trench—typically come with a tradeoff between thermal tuning efficiency and tuning speed. Here, we propose a method that allows us to directly define the tradeoff using a specially designe...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-11-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/11/1925 |