Research trends in China for macro-micro motion platform for microelectronics manufacturing industry
Integrated circuits industry is inherently linked to the national economy development and the security national defense in China. Its product quality and productivity as bottleneck resolutions are crucially depended on the performance of microelectronic equipment motion platform. However, motion pla...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2021-05-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/15/3/15_2021jamdsm0032/_pdf/-char/en |