Research trends in China for macro-micro motion platform for microelectronics manufacturing industry
Integrated circuits industry is inherently linked to the national economy development and the security national defense in China. Its product quality and productivity as bottleneck resolutions are crucially depended on the performance of microelectronic equipment motion platform. However, motion pla...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2021-05-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/15/3/15_2021jamdsm0032/_pdf/-char/en |
| _version_ | 1818521814778773504 |
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| author | Xueli LI Lufan ZHANG Boshi JIANG Jiwen FANG Yaxin ZHENG |
| author_facet | Xueli LI Lufan ZHANG Boshi JIANG Jiwen FANG Yaxin ZHENG |
| author_sort | Xueli LI |
| collection | DOAJ |
| description | Integrated circuits industry is inherently linked to the national economy development and the security national defense in China. Its product quality and productivity as bottleneck resolutions are crucially depended on the performance of microelectronic equipment motion platform. However, motion platforms face a series of requirements including high-acceleration, ultra-precision positioning and so on. These requirements can be theoretically addressed by a typical macro-micro driving concept platform. Therefore, kinds of motion platform are proposed and Implemented. In the process of exploring analysis of macro-micro motion platform, especially for some key structures such as link frames, flexible hinge mechanisms, etc., many effective multiphysics coupling optimization methods are proposed to obtain superior performance of platform. Meanwhile, the vibration suppression of macro-micro motion platform is described to ensure ultra-precise positioning. At last, the development trends and facing problems of macro-micro motion platform are suggested. This review will promote the upgrading of microelectronics manufacturing equipment and accelerate the rapid development of microelectronics manufacturing industry. |
| first_indexed | 2024-12-11T01:56:23Z |
| format | Article |
| id | doaj.art-16974f6c161b4f34977bc91472dae13b |
| institution | Directory Open Access Journal |
| issn | 1881-3054 |
| language | English |
| last_indexed | 2024-12-11T01:56:23Z |
| publishDate | 2021-05-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| spelling | doaj.art-16974f6c161b4f34977bc91472dae13b2022-12-22T01:24:36ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542021-05-01153JAMDSM0032JAMDSM003210.1299/jamdsm.2021jamdsm0032jamdsmResearch trends in China for macro-micro motion platform for microelectronics manufacturing industryXueli LI0Lufan ZHANG1Boshi JIANG2Jiwen FANG3Yaxin ZHENG4School of Mechanical and Electronic Engineering, Zhongyuan University of TechnologySchool of Mechanical and Electrical Engineering, Henan University of TechnologySchool of Mechanical and Electrical Engineering, Henan University of TechnologySchool of Mechanism Engineering, Jiangsu University of Science and TechnologySchool of Mechanical and Electrical Engineering, Henan University of TechnologyIntegrated circuits industry is inherently linked to the national economy development and the security national defense in China. Its product quality and productivity as bottleneck resolutions are crucially depended on the performance of microelectronic equipment motion platform. However, motion platforms face a series of requirements including high-acceleration, ultra-precision positioning and so on. These requirements can be theoretically addressed by a typical macro-micro driving concept platform. Therefore, kinds of motion platform are proposed and Implemented. In the process of exploring analysis of macro-micro motion platform, especially for some key structures such as link frames, flexible hinge mechanisms, etc., many effective multiphysics coupling optimization methods are proposed to obtain superior performance of platform. Meanwhile, the vibration suppression of macro-micro motion platform is described to ensure ultra-precise positioning. At last, the development trends and facing problems of macro-micro motion platform are suggested. This review will promote the upgrading of microelectronics manufacturing equipment and accelerate the rapid development of microelectronics manufacturing industry.https://www.jstage.jst.go.jp/article/jamdsm/15/3/15_2021jamdsm0032/_pdf/-char/enintegrated circuits industrymacro-micro motion platformhigh-accelerationhigh-speedultra-precision positioning |
| spellingShingle | Xueli LI Lufan ZHANG Boshi JIANG Jiwen FANG Yaxin ZHENG Research trends in China for macro-micro motion platform for microelectronics manufacturing industry Journal of Advanced Mechanical Design, Systems, and Manufacturing integrated circuits industry macro-micro motion platform high-acceleration high-speed ultra-precision positioning |
| title | Research trends in China for macro-micro motion platform for microelectronics manufacturing industry |
| title_full | Research trends in China for macro-micro motion platform for microelectronics manufacturing industry |
| title_fullStr | Research trends in China for macro-micro motion platform for microelectronics manufacturing industry |
| title_full_unstemmed | Research trends in China for macro-micro motion platform for microelectronics manufacturing industry |
| title_short | Research trends in China for macro-micro motion platform for microelectronics manufacturing industry |
| title_sort | research trends in china for macro micro motion platform for microelectronics manufacturing industry |
| topic | integrated circuits industry macro-micro motion platform high-acceleration high-speed ultra-precision positioning |
| url | https://www.jstage.jst.go.jp/article/jamdsm/15/3/15_2021jamdsm0032/_pdf/-char/en |
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