Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer

Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer

In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained. The sensitivity can be increased by increasing the detection proof mass and the area facing the detection capacitor pl...

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Bibliographic Details
Main Authors: Heng Liu, Yu Zhang, Jiale Wu
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Micromachines
Subjects:
resonant accelerometer
sensitivity
self-excited oscillation
frequency stability
Allan variance
Online Access:https://www.mdpi.com/2072-666X/13/8/1281

Internet

https://www.mdpi.com/2072-666X/13/8/1281

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