Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride

This paper evaluates the mechanical properties of amorphous silicon carbon nitride (a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></sem...

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Bibliographic Details
Main Authors: Chaoyue Ji, Xintian Cai, Zhen Zhou, Bing Gao, Sheng Liu
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/15/19/6865