Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride
This paper evaluates the mechanical properties of amorphous silicon carbon nitride (a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></sem...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-10-01
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Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/15/19/6865 |